| 摘要 |
PROBLEM TO BE SOLVED: To reduce a risk of damage to a holding table due to irradiation with a laser beam.SOLUTION: A workpiece W is suctionally held on a holding surface 54 of a holding table 51 with a scatter sheet 100, having a larger size than an irradiation area for a laser beam L, interposed (holding step), and an altered layer W1 is formed by irradiating the inside of the workpiece W with the laser beam L along a predetermined division line (laser processing step). The laser beam L travels to outside an outer peripheral edge of the workpiece W within the irradiation area La, but is prevented from irradiating the holding table 51 directly by being made to irradiate the scatter sheet 100 to be scattered. |
