发明名称 ION MASS SELECTOR, ION IRRADIATOR, SURFACE ANALYSIS DEVICE AND ION MASS SELECTION METHOD
摘要 <p>PROBLEM TO BE SOLVED: To solve such a problem that it is required to adjust the passage energy depending on the ion mass, for controlling mass resolution independently from the time width of a trigger pulse, in a time-of-flight mass selector, but when the passage energy changes, trajectory of cluster ion incident on the time-of-flight mass selector also changes, and thereby the efficiency of cluster ion transmitting through the time-of-flight mass selector varies.SOLUTION: A time-of-flight mass selector includes a first ion lens for focusing ions, a flight tube having an equipotential space into which ions incident from the first ion lens are introduced, a second ion lens for focusing the ions discharged from the flight tube, and a gate chopper for pulsing the ions focused by the second ion lens.</p>
申请公布号 JP2014116294(A) 申请公布日期 2014.06.26
申请号 JP20130232982 申请日期 2013.11.11
申请人 CANON INC 发明人 IWASAKI KOTA
分类号 H01J49/40;G01N27/62;H01J49/10 主分类号 H01J49/40
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