Preparation and Application of a Piezoelectric Film for an Ultrasound Transducer

摘要

The present disclosure involves a method of fabricating an ultrasound transducer. A piezoelectric polymer is mixed into a solution containing a first chemical and a second chemical to form a viscous film. In some embodiments, the first chemical includes methyl ethyl ketone (MEK), and the second chemical includes dimethylacetamide (DMA). In other embodiments, the first chemical includes cyclohexanone, and the second chemical includes dimethyl sulfoxide (DMSO). The film is coated onto a wafer and then flashed off during the coating. Thereafter, the film is baked. The second chemical is removed during the baking. Thereafter, the film is annealed. In some embodiments, the annealing is performed using an annealing temperature in a range from about 135 degrees Celsius to about 145 degrees Celsius and an annealing duration in a range from about 17 hours to about 19 hours. The film has a β phase crystallinity greater than 50% after the annealing.

主权项

1. A method of fabricating an ultrasound transducer, the method comprising:
mixing a piezoelectric polymer into a solution containing a first chemical and a second chemical to form a viscous film; coating the film onto a wafer, wherein the first chemical is substantially flashed off during the coating; thereafter baking the film, wherein the second chemical is substantially removed during the baking; and thereafter annealing the film, wherein the film has a β phase crystallinity greater than 50% after the annealing.