| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a vibrator in which a stress concentrated portion is reduced, reliability is improved and inter-electrode short-circuiting is suppressed.SOLUTION: The method of manufacturing a vibrator includes the steps of: (a) forming a first layer on a substrate; (b) performing ion implantation of a first impurity into a first region of the first layer; (c) patterning the first layer to form a first electrode having a tapered surface in a side surface part; (d) forming a sacrifice layer on the first electrode and the tapered surface of the first electrode; (e) forming a second electrode so as to dispose a top face part of the first electrode and the tapered surface of the first electrode on the substrate and the sacrifice layer while opposing each other at least partially; and (f) removing the sacrifice layer. The step (b) is implemented so as to monotonously decrease a concentration of the first impurity from a top face side to a bottom face side at a position deeper than the top face of the first electrode by 10 nm or more. |
