EXCIMER LASER COMBINATION CAVITY

摘要

Disclosed is an excimer laser combination cavity, comprising a laser discharge cavity, a laser output module, a line-width narrowing module, and a laser amplification module; the laser discharge cavity contains working gas therein; the working gas generates a laser under the effect of an excitation source; the laser discharge cavity, the laser output module, and the line-width narrowing module form a line-width narrowing cavity for narrowing the line-width of the laser generated by the working gas; the laser discharge cavity, the laser output module, and the laser amplification module form an amplification cavity for amplifying the energy of the laser after the line-width is narrowed. The present invention can output a narrow line-width of an excimer laser, and improve the energy and stability of the outputted laser via the combination cavity design. In addition, the combination cavity of the present invention has a simple structure and is easy to manufacture and tune.