| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation inspection device capable of preparing a high definition tomographic image or a projection image highly accurately positioned even when a repeated positioning accuracy is insufficient due to the generation of an undefined posture change on the stage.SOLUTION: In an X-ray inspection device, rotation variation amounts &thetas;x, &thetas;y of a stage are calculated by setting sliding parts 0x, 0y which are drive force transmission parts with a stage and a stage drive part as a base point based on detection position information Xsen, Ysen by a position detection sensor. Stage variation amounts &Dgr;x, &Dgr;y are calculated based on the rotation variation amounts &thetas;x, &thetas;y, and a distance between a base point and an imaging position on the stage. The stage variation amounts &Dgr;x, &Dgr;y are position deviations of the stage at an imaging position due to the posture variation of the stage in a yawing-direction and repeated positioning errors. Hence, a high definition tomographic image S where the repeated positioning errors are considered can be prepared. |
