Segregating wafer carrier types in semiconductor storage devices

摘要

A system for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation is disclosed. The system comprises a stocker that accepts wafer carriers via one or more input ports. The present invention provides a means for detecting the presence of a wafer carrier at the input port, means for identifying the type of the wafer carrier, and means for executing an action sequence if the stocker is not compatible with those wafer carriers. Upon detecting an erroneous condition, an action sequence is executed which may include prevention entry of the wafer carrier, and notifying an operator.

主权项

1. A system for managing the entry of a wafer carrier into a stocker in a semiconductor manufacturing operation comprising:
said stocker having at least one input port; means for detecting the presence of the wafer carrier at the input port; means for identifying the type of the wafer carrier; means for identifying the model of the wafer carrier; means for identifying the material used to construct the wafer carrier; and means for executing an action sequence if the stocker is not compatible with the identified material used to construct the wafer carrier; wherein the means for identifying the material used to construct the wafer carrier comprises a plurality of electromechanical identification pins on the underside of the wafer carrier, wherein said plurality of identification pins are configured and arranged to form a pattern corresponding to the wafer carrier type, said plurality of identification pins contacting a corresponding plurality of wafer carrier type detection pins disposed on the input port, thereby providing an indication of wafer carrier type.