Detection apparatus and radiation detection system

摘要

A stacked-type detection apparatus including a plurality of pixels arranged at small intervals is configured to have low capacitance associated with signal lines and/or driving lines. With this novel configuration, small time constant and high-speed driving capability can be achieved in the signal lines and/or driving lines. The plurality of pixels in the detection apparatus are arranged in a row direction and a column direction on an insulating substrate. Each pixel includes a conversion element and a switch element, the conversion element is disposed above the switch element. A driving line disposed below the conversion elements is connected to switch elements arranged in the row direction, and a signal line is connected to switch elements arranged in the column direction. The signal line includes a conductive layer embedded in an insulating member, the insulating member is disposed in a layer lower than an uppermost surface portion of the driving line.

主权项

1. A detection apparatus comprising:
a plurality of pixels arranged in a row direction and a column direction on an insulating substrate, each pixel including a conversion element configured to convert radiation or light into an electric charge and a switch element disposed on the insulating substrate and configured to output an electric signal corresponding to the electric charge, the conversion element being disposed above the switch element; a driving line disposed below the conversion element and connected to each of the switch elements arranged in the row direction; and a signal line connected to each of the switch elements arranged in the column direction, wherein the signal line includes a conductive layer embedded in an insulating member, and the insulating member being disposed in a layer lower than an uppermost surface portion of the driving line.