| 发明名称 | Delivery device and method of use thereof | ||
| 摘要 | A delivery device comprises an inlet port and an outlet port. The delivery device comprises an inlet chamber and an outlet chamber, with the outlet chamber being opposedly disposed to the inlet chamber and in fluid communication with the inlet chamber via a conical section. The outlet chamber comprises a labyrinth that is operative to prevent solid particles of a solid precursor compound contained in the delivery device from leaving the delivery device while at the same time permitting vapors of the solid precursor compound to leave the delivery device via the outlet port. | ||
| 申请公布号 | US8758515(B2) | 申请公布日期 | 2014.06.24 |
| 申请号 | US201012853052 | 申请日期 | 2010.08.09 |
| 申请人 | Rohm and Haas Electronic Materials LLC | 发明人 | Woelk Egbert;DiCarlo Ronald L. |
| 分类号 | C23C16/00;B01D47/00;B01J27/132 | 主分类号 | C23C16/00 |
| 代理机构 | Cantor Colburn LLP | 代理人 | Cantor Colburn LLP |
| 主权项 | 1. A delivery device comprising: an inlet port; an outlet port; an inlet chamber; and an outlet chamber; the outlet chamber being opposedly disposed to the inlet chamber and in fluid communication with the inlet chamber via a conical section; the outlet chamber comprising a labyrinth that is operative to prevent particles of a solid precursor compound contained in the delivery device from leaving the delivery device while at the same time permitting vapors of the solid precursor compound to leave the delivery device via the outlet port; where the labyrinth is formed by a restrictor, the conical section and an inner wall of the delivery device; where a portion of the conical section protrudes through a plane that includes a surface of the restrictor. | ||
| 地址 | Marlborough MA US | ||