High-voltage supply unit for a particle beam device

摘要

A high-voltage supply unit is provided for a particle beam device. The high-voltage supply unit includes at least one high-voltage cable for feeding a high voltage, and at least one measuring device for measuring the high voltage. The measuring device has at least one first capacitor, and the first capacitor is formed by at least one first section of the high-voltage cable.

主权项

1. A high-voltage supply unit for a particle beam device, comprising:
at least one high-voltage cable for feeding a high voltage; and at least one measuring device for measuring the high voltage, wherein the measuring device has at least one first capacitor, wherein the first capacitor is formed by at least one first section of the high-voltage cable, wherein the high-voltage cable has at least one internal conductor, wherein the internal conductor is surrounded by at least one first insulation, wherein the first insulation is surrounded by at least one first shield, wherein the at least one first shield is interrupted in at least one of: a first region or a second region of the first section of the high-voltage voltage cable, wherein the first section of the high-voltage cable is surrounded by at least one second shield, and wherein both the at least one first shield and the at least one second shield serve to protect persons working with the high-voltage supply unit.