| 摘要 |
Provided are ultrasonic cleaning apparatuses of cleaning approximately flat articles and methods thereof. The ultrasonic cleaning apparatus includes (i) an approximately circular tank; (ii) cleaning fluid inlet parts for transferring a cleaning fluid to the tank; (iii) a middle supporting unit for receiving articles to be cleaned; and (iv) an ultrasonic generator which generates an ultrasonic wave and is coupled with the tank to clean the received fluid inside. The apparatus removes particles from approximately flat articles and transfers the particles to the outside of the tank by separating the particles from the articles by the flow of the cleaning fluid. By this apparatus, the cleaning method includes a step of supplying approximately flat articles to be cleaned into the tank; a step of supplying a cleaning fluid to the tank through a plurality of the cleaning fluid inlet parts; and a step of activating the cleaning fluid with an ultrasonic wave. |
