APPARATUS OF DEPOSITING THIN FILM OF OGANIC LIGHT EMITTING DIODE AND METHOD OF MANUFACTURING LIGHT EMITTING DIODE

摘要

The present invention provides an apparatus for depositing a thin film of an organic light emitting device which comprises: a plurality of processing chambers arranged by being extended along one direction; a substrate transport robot which is configured in both sides while sandwiching the plurality of processing chambers, and moves along the one direction; and a mask carrying robot. According to the present invention, cost savings and efficiency can be improved for the apparatus for depositing the thin film of the organic light emitting device.