发明名称 COMPENSATION DEVICE FOR STAGE FLATNESS RATIO OF CONNATION COALESCENCE BOARD
摘要 The present invention relates to a device to correct stage flatness of a coalescent board capable of improving product quality and improving a yield according to a coalescent process of a board by forming equal pressure of the board according to the flatness equality of a stage since the flatness of a corresponding stage is automatically corrected even if the stage in which the board is placed is tilted at a predetermined angle. The device is composed by including a base; a lower stage included in an upper side of the base and in which the board is placed; a rotating unit combined with the center of the lower stage while being placed in the based and freely rotating in every direction of a horizontal direction while elevating the lower stage; and multiple side fixing units placed on the base while being separated around the rotating unit at predetermined intervals to be combined with the lower stage and maintaining a rotating state of the lower stage while being elevated according to the free rotating of the lower stage.
申请公布号 KR101408644(B1) 申请公布日期 2014.06.18
申请号 KR20130019753 申请日期 2013.02.25
申请人 TOPTEC CO., LTD. 发明人 KIM, TAE WON;AN, CHI HONG;SHIN, YONG UK;JANG, JAE HYEOK
分类号 H01L51/56;B23Q1/26;H01L21/683 主分类号 H01L51/56
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