发明名称 |
COMPENSATION DEVICE FOR STAGE FLATNESS RATIO OF CONNATION COALESCENCE BOARD |
摘要 |
The present invention relates to a device to correct stage flatness of a coalescent board capable of improving product quality and improving a yield according to a coalescent process of a board by forming equal pressure of the board according to the flatness equality of a stage since the flatness of a corresponding stage is automatically corrected even if the stage in which the board is placed is tilted at a predetermined angle. The device is composed by including a base; a lower stage included in an upper side of the base and in which the board is placed; a rotating unit combined with the center of the lower stage while being placed in the based and freely rotating in every direction of a horizontal direction while elevating the lower stage; and multiple side fixing units placed on the base while being separated around the rotating unit at predetermined intervals to be combined with the lower stage and maintaining a rotating state of the lower stage while being elevated according to the free rotating of the lower stage. |
申请公布号 |
KR101408644(B1) |
申请公布日期 |
2014.06.18 |
申请号 |
KR20130019753 |
申请日期 |
2013.02.25 |
申请人 |
TOPTEC CO., LTD. |
发明人 |
KIM, TAE WON;AN, CHI HONG;SHIN, YONG UK;JANG, JAE HYEOK |
分类号 |
H01L51/56;B23Q1/26;H01L21/683 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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