| 发明名称 |
MICROMECHANICAL RESONATOR ARRANGEMENT |
| 摘要 |
The invention relates to a micromechanical resonator arrangement, in particular micro-mirror scanner with an inner actuator, which comprises an oscillation body capable of oscillation about at least one axis, and with an outer actuator with an oscillating part. The inner and outer actuator form a coupled oscillation system, and the outer actuator is driven by an external drive whose drive frequency is selected in a manner such that the oscillation body of the inner actuator oscillates with one of its eigenmodes or close to this eigenmode. The inner actuator is at least one vacuum-encapsulated micro-actuator chip which is fastened on the oscillating part of the outer actuator. |
| 申请公布号 |
US2014159827(A1) |
申请公布日期 |
2014.06.12 |
| 申请号 |
US201314103227 |
申请日期 |
2013.12.11 |
| 申请人 |
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. |
发明人 |
Hofmann Ulrich;Janes Joachim |
| 分类号 |
H03B5/30;B81B3/00 |
主分类号 |
H03B5/30 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micromechanical resonator arrangement, in particular a micro-mirror scanner, comprising:
an inner actuator which comprises an oscillation body capable of oscillation about at least one axis, and an outer actuator with an oscillating part, wherein the inner and outer actuator form a coupled oscillation system, and the outer actuator is driven by an external drive whose drive frequency is selected in a manner such that the oscillation body of the inner actuator oscillates with one of its eigenmodes or close to this eigenmode, and wherein the inner actuator is at least one vacuum-encapsulated micro-actuator chip which is fastened on the oscillating part of the outer actuator.
|
| 地址 |
Munchen DE |
