PELLICLE FRAME AND PROCESS FOR MANUFACTURING SAME

摘要

Provided are: a pellicle frame which can inhibit the occurrence of haze and which exhibits little surface glittering defect even under concentrated light; and a process for manufacturing the same. A pellicle frame characterized by being obtained by: using an aluminum frame material having such a structure that the equivalent circle diameters of crystallized products of Mg2Si, AlCuMg, Al-Fe based compounds (AlmFe or Al7Cu2Fe) and Al2CuMg and the area fractions of the crystallized products which have equivalent circle diameters of 1μm or more satisfy prescribed requirements; and subjecting the aluminum frame material to anodic oxidation with an alkaline electrolytic solution which contains a prescribed organic acid salt as an electrolyte. A process for manufacturing a pellicle frame, characterized by comprising: preparing an aluminum frame material having a structure described above; and subjecting the frame material to anodic oxidation with an alkaline electrolytic solution which contains a prescribed organic acid salt to form an anodic oxidation coating.