发明名称 STRIPPING COMPOSITIONS COMPRISING MIXTURES OF ALKYLAMIDES
摘要 The present invention discloses stripping compositions having mixtures of alkylamides. The stripping compositions comprise 50-70% by weight of N-methylformamide, 30 50% by weight of N,N-dimethylacetamide, and the remainder being water. The stripping compositions have the advantages of being water miscible, being non-corrosive to copper or copper alloy, and having low toxicity to humans and the environment. Due to the stripping composition comprising two main components, the used stripping solution can be easily recovered by fractional distillation and reconstituted to the original formulation, and recycled in the manufacturing process to provide benefits including cost reduction and environmental protection. Also disclosed in the present invention are methods for removing photoresist using the stripping compositions.
申请公布号 KR20140071445(A) 申请公布日期 2014.06.11
申请号 KR20147010936 申请日期 2012.09.24
申请人 E.I. DU PONT DE NEMOURS AND COMPANY 发明人 LEE HAO CHUN;MAW TAISHIH;WU FU CHI;CHANG KAI CHIEN;FANG HSU CHIANG
分类号 G03F7/42 主分类号 G03F7/42
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