SEMICONDUCTOR MATERIAL, TRANSISTOR INCLUDING SEMICONDUCTOR MATERIAL AND ELECTRONIC DEVICE INCLUDING TRANSISTOR

摘要

A semiconductor material, a transistor including semiconductor material, and an electronic device including a transistor are provided. The disclosed semiconductor material may include zinc, nitrogen, and fluorine. The semiconductor material may further include oxygen. The semiconductor material may further include a compound, such as, zinc fluorooxynitride, zinc oxynitride containing fluorine, and zinc fluoronitride. The semiconductor material can be used for the channel material of a thin film transistor.