| 摘要 |
A variable resonance frequency resonator comprising a fixed electrode (1), a movable electrode (3) arranged oppositely to the fixed electrode while spaced apart therefrom, a spring member consisting of a plurality of leaf springs (2) having a conducting function, arranged oppositely while spaced apart from each other and being bent outward or inward previously, with one end of each leaf spring being integrated with the fixed electrode and the other end of each leaf spring being integrated with the movable electrode, and an actuator (6) for deforming the leaf spring by pushing/pulling the movable electrode. Since the variable resonance frequency resonator comprises the fixed electrode, the movable electrode arranged oppositely to the fixed electrode while spaced apart therefrom, a spring member consisting of a plurality of leaf springs having a conducting function, arranged oppositely while spaced apart from each other and being bent outward or inward previously, with one end of each leaf spring being integrated with the fixed electrode and the other end of each leaf spring being integrated with the movable electrode, and an actuator for deforming the leaf spring by pushing/pulling the movable electrode, variations in element function is minimized, the yield can be enhanced and costs can be lowered.
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