| 摘要 |
FIELD: chemistry.SUBSTANCE: invention relates to method of purification of phosphine-containing germane for obtaining purified germane product. Method includes supply of gaseous phosphine-containing germane; drying molecular sieve; conditioning dried molecular sieve by passing flow of gaseous germane through molecular sieve until molecular sieve is saturated with germane; passing gaseous phosphine-containing germane through conditioned molecular sieve, which selectively adsorbs phosphine, contained in it, and removal of purified gaseous germane. Purified gaseous germane contains less than 50 ppb of phosphine.EFFECT: invention ensures high degree of germane purification from phosphine.12 cl, 3 dwg, 3 ex |
