| 摘要 |
PURPOSE: A manufacturing method of a zinc oxide target and a zinc oxide target thereby are provided to maximize the duration of a target usage because of the generation of a little nozzle in comparison to the target whereby ZnO and ZnGa204 are separated to each other by generating single superlattice of ZnO and Ga. CONSTITUTION: A manufacturing method of a zinc oxide target comprises a first dispersing step(S210) preparing gallium oxide dispersed liquid through wet milling after mixing gallium oxide powder, distilled water, and a first dispersant; a second dispersion step(S220) preparing mixed slurry through wet milling after mixing the second dispersant, gallium oxide dispersed liquid, gallium oxide powder; adding step(S230) adding a binder to the mixed slurry; granulation step(S240) manufacturing granule powder by spray drying the mixed slurry adding the binder; molding step of manufacturing the granule powder with a mold, a sintering step(S260) of manufacturing a sintered body. The first dispersant is added to be 0.2-0.9 parts by weight in comparison with gallium oxide powder 100 parts by weight. The gallium oxide dispersant is processed with wet milling in order that dispersion average diameter is 0.2-0.5μm. The second dispersant is added in order to be 0.3-1.5 parts by weight in comparison with ZnO powder 100 parts by weight. [Reference numerals] (S210) First dispersion step; (S220) Second dispersion step; (S230) Adding step; (S240) Granulation step; (S250) Molding step; (S260) Sintering step |
