X-RAY IMAGE DETECTOR WITH CHARGE ACCUMULATION LAYER FORMED ISOLATION PATTERN AND METHOD OF MANUFACTURING THIS

摘要

The present invention relates to an X-ray image detector including a charge accumulation layer having an insulating pattern and a method of manufacturing the same. The X-ray image detector based on an optical switching scheme includes a glass substrate formed therein with a plurality of electrode lines, and an X-ray photoconduction layer (X-ray PCL), a charge accumulation layer, and a read-out PCL which are sequentially stacked from an upper portion of the glass substrate. The charge accumulation layer includes insulating patterns corresponding to the electrode lines on the glass substrate in order to concentrate charge accumulation according to regions and to induce an internal electric field of the read-out PCL according to the regions. As described above, according to the present invention, the X-ray image detector including the charge accumulation layer having the insulating pattern according to the present invention concentrates charge accumulation of the charge accumulation layer according to pixel regions through the insulating pattern or induces the internal electric field of the read-out PCL according to the regions, thereby more enhancing the resolution of the image.