SUBSTRATE FOR CARBON NANOTUBE GROWTH AND METHOD FOR MANUFACTURING THE SAME

摘要

Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a catalyst 3, a form-defining material layer 4 which allows the catalyst 3 to be dispersed and arranged, and a covering layer 5 which has a metal oxide to cover the catalyst. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering on a base plate 2 a metal which forms a catalyst 3 and oxidizing the surface of the metal, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering on the form-defining material a metal which forms a catalyst 3 and oxidizing the surface of the metal.

主权项

1. A substrate for carbon nanotube growth comprising a base plate and a catalyst disposed on the base plate, the substrate comprising:
a catalyst consisting of a transition metal; a form-defining material layer which is formed on the base plate to define a form which allows the catalyst to be dispersed and arranged; and a covering layer which consists of a metal oxide to cover the surface of the catalyst.