| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a power supply device for a vacuum pump that can prevent an excessive reaction to an increase in humidity caused by release of hygroscopic moisture while preventing condensation from forming in the power supply.SOLUTION: A power supply device for a vacuum pump comprises: a cooling pipe 5 in which a refrigerant flows; a temperature sensor 12 for detecting temperature of the cooling pipe 5; and a cooling water valve 6 for adjusting the flow rate of the refrigerant in the cooling pipe 5. A CPU 8 controls the opening/closing of the cooling water valve 6 so that the temperature detected by the temperature sensor 12 is equal to an upper limit temperature for refrigerant control. For example, the cooling water valve 6 is controlled to be closed if the detected temperature exceeds the upper limit temperature for refrigerant control, and the cooling water valve 6 is controlled to be opened if the detected temperature falls below the upper limit temperature for refrigerant control. Consequently, condensation is unlikely to form because the internal temperature of the power supply device 3 is kept as high as possible in terms of temperature control.</p> |
