METHODS OF USING POLISHED SILICON WAFER STRIPS FOR EUV HOMOGENIZER

摘要

The present invention is a light homogenizer or light tunnel with highly reflective sides that enable the focusing of EUV illumination. The sides of the homogenizer are cut from a highly polished silicon wafer. The wafer is coated with a reflective coating before the strips are cut from the wafer. The invention also includes a method for flattening the strips and applying a backing to the strips enabling easier manipulation of the strips during assembly and use.

主权项

1. A EUV light homogenizer for a EUV reticle inspection system comprising:
a hollow four sided tunnel, wherein said four sided tunnel include four flat strips, each of said four flat strips having an inner surface and an outer surface; wherein each of said inner surfaces is coated with a high reflectivity coating; and, wherein said four strips are joined to form said four-sided tunnel.