ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICAL SYSTEM

摘要

The invention relates to an arrangement for actuating an element in an optical system, in particular an optical system of a projection exposure apparatus, wherein the optical element (101) is tiltable about at least one tilting axis by means of at least one joint (102) having a joint stiffness, comprising at least one actuator (104) for exerting a force on the optical element (101), wherein the actuator (104) has an actuator stiffness which at least partly compensates for the joint stiffness.