| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a white color interference device, and a measuring method of a position and displacement of the white color interference device.SOLUTION: A white color interference device 101 radiates a first measuring beam 104 to a measuring object 156, and simultaneously radiates a second measuring beam 110 to a fixed reference target 140. First, difference between a measured value of the measuring object 156 and a measured value of the reference target 140 is calculated, and the error by a disturbance influence is removed. Next, comparison and reference are performed using the measured value after the error by the disturbance influence is removed and data for calibration. In other words, operation error data of averaged pitching and yawing of a direct-acting stage 126 is removed from the measured value after the error by the disturbance influence is removed, thereby acquiring real measurement data.</p> |
