Pneumatic Clamping Mechanism for Cells with Adjustable Height

摘要

In some embodiments of the present disclosure, an apparatus for combinatorial wet processing includes: a chuck, a substrate located on the chuck, a cell located over the substrate; and a height adjustment mechanism for the cell above the substrate wherein applying compressed air on an O-ring in a gland prevents vertical movement of the cell relative to the position of the substrate.

主权项

1. An apparatus for combinatorial wet processing comprising:
a chuck operable to hold a wafer thereon; a plurality of cells disposed over the chuck; and a structure disposed around each of the cells; wherein the structure comprises a gland and an O-ring; wherein the O-ring is operable to maintain a height for each of the cells above the chuck when compressed air is applied to the O-ring.