Oberflächenbearbeitungsvorrichtung und Oberflächenbearbeitungsverfahren

摘要

In the present invention, the form in which roughness is formed on the surface of an article being processed through plasma exposure is controlled by varying the frequency for a main voltage applied to two discharge electrodes, a conductive housing and a rod shaped electrode, provided in a plasma generating unit and the frequency for a bias voltage applied between the conductive housing (2) and the article being processed.