| 摘要 |
PROBLEM TO BE SOLVED: To provide a dry environment chamber facility capable of reducing initial cost and running cost by decreasing an air amount output from a dehumidifier. SOLUTION: The dry environment chamber facility supplies dehumidified air dehumidified by a dehumidifier to two or more chambers. The chambers are composed of dry environment chambers that are a high condition chamber of a predetermined humidity and semi-dry environment chambers that are a low condition chamber of relatively higher humidity than the dry environment chambers of the high condition chamber. Dehumidified air is supplied from the dehumidifier to the dry environment chamber. Also, internal dehumidified air is supplied from the dry environment chamber to the semi-dry environment chamber. COPYRIGHT: (C)2012,JPO&INPIT |
