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发明名称
用于显微微影术之光敏硬遮罩
摘要
申请公布号
TWI440069
申请公布日期
2014.06.01
申请号
TW098113284
申请日期
2009.04.22
申请人
布鲁尔科技公司 美国
发明人
徐昊;摩卡杜 瑞米尔 马瑟罗L;谷瑞罗 道格拉斯J
分类号
H01L21/027;G03F1/86;G03F7/027
主分类号
H01L21/027
代理机构
代理人
桂齐恒 台北市中山区长安东路2段112号9楼;阎启泰 台北市中山区长安东路2段112号9楼
主权项
地址
美国
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