| 摘要 |
A photoacoustic gas sensor, system and method is generally described. In some examples, a photoacoustic gas sensor includes a MEMS-based wavelength-selective optical modulator and a ring array of acoustic sensors. The MEMS-based optical modulator can be adapted to provide flexible wavelength selectivity such that a large number of chemical compounds may be detected. The ring array of acoustic sensors can be adapted to measure photoacoustically generated acoustic signals without the need for resonant enhancement of a photoacoustic cell of the gas sensor. In some examples, a unique uncorrelated and deterministic signal may be used to modulate each light wavelength of interest. Signal processing may be used that allows the simultaneous measurement of the absorption spectra of multiple optical wavelengths as well as the rejection of unwanted acoustic noise. |
