发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 <p>Provided is a method for fabricating a semiconductor device which can increase the capacitance of a capacitor without increasing the thickness of a mold. The method for fabricating a semiconductor device includes forming an insulating layer where a first mold layer, a first support layer, a second mold layer, and a second support layer are successively stacked on a substrate, forming a contact hole in the insulating layer, forming a lower electrode in the contact hole, removing the lower part of the second support layer and the second mold layer, removing the first mold layer, and forming a second support pattern which surrounds the lower electrode and a first support pattern respectively.</p>
申请公布号 KR20140062602(A) 申请公布日期 2014.05.26
申请号 KR20120128228 申请日期 2012.11.13
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, HONG GUN;KO, YOUNG MIN;HWANG, KWANG TAE
分类号 H01L21/8242;H01L27/108 主分类号 H01L21/8242
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