| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thermal treatment device and a thermal treatment method which inhibit temperature distribution during cooling.SOLUTION: A thermal treatment device of the invention comprises: a cooling chamber 120 which cools a heated processed object M; a mist supply part 20 which supplies coolant mist to the cooling chamber 120; a gas supply part 30 which supplies a gas to the cooling chamber 120 to adjust a flow direction of the coolant mist; an on-off valve 38 which changes a supply direction of the gas stored in the gas supply part 30; a temperature measurement part 40 which measures a temperature of the processed object M; and a control part 50 which controls the on-off valve 38 on the basis of a measurement result of the temperature measurement part 40. The temperature measurement part 40 measures the temperature of the processed object M at multiple positions. The control part 50 controls the on-off valve 38 on the basis of a measured temperature difference in the processed object M.</p> |
