ULTRASONIC FLOWMETER MANUFACTURING METHOD, ULTRASONIC FLOWMETER, AND FLUID CONTROL DEVICE WITH ULTRASONIC FLOWMETER

摘要

PROBLEM TO BE SOLVED: To suppress adhesion of a fine bubbles to an inner peripheral surface of a measuring pipe of an ultrasonic flowmeter and to improve accuracy of measurement of the ultrasonic flowmeter.SOLUTION: An ultrasonic flowmeter 10 includes: a measuring pipe 1 circulating fluid inside; and two ultrasonic transceiver devices 3 disposed and spaced in the axial direction at an outside part of the measuring pipe 1. An inner peripheral surface 1a of the measuring pipe 1 is hydrophilized by plasma treatment, and adhesion of fine bubbles to the inner peripheral surface 1a of the measuring pipe 1 is suppressed.