发明名称 Systems and Methods to Enhance Product Yield for Semiconductor Manufacturing
摘要 A system for fabricating semiconductor products includes a list of products to be fabricated, a list of available semiconductor fabrication tools, a product and tool matrix database, and a product and tool selection engine. The product and tool matrix database is configured to include performance and manufacturing information for the products to be fabricated and the available tools. The product and tool selection engine is configured to generate an enhanced matching of the products to be fabricated and the available semiconductor fabrication tools.
申请公布号 US2014143006(A1) 申请公布日期 2014.05.22
申请号 US201213678600 申请日期 2012.11.16
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD. 发明人 CHANG YUNG-CHENG
分类号 G06Q10/06 主分类号 G06Q10/06
代理机构 代理人
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