发明名称 AROMATIC IMIDE COMPOSITION AND METHOD OF PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an aromatic imide composition having enhanced sensitivity to g ray, h ray and the like and improved solubility.SOLUTION: There is provided a compound represented by formula (1). In the formula (1), Rrepresents a haloalkyl group or a haloaryl group having 1 to 7 carbon atoms, Rrepresents a substituted or unsubstituted aliphatic group or an aromatic group which may contain a hetero group, Rrepresents a halogen atom or a hydrocarbon group, m is 0 or an integer of 1 or more, n is 0 or an integer of 1 or more, and the sum of m and n is 1 to 6.
申请公布号 JP2014094926(A) 申请公布日期 2014.05.22
申请号 JP20120248648 申请日期 2012.11.12
申请人 AZ ELECTRONIC MATERIALS MFG CO LTD 发明人 HIRAOKA ERI;RALF DAMMEL;GEORG PAWLOWSKI
分类号 C07D221/14;C07D409/06 主分类号 C07D221/14
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