APPARATUS OF DEPOSITING THIN FILM

摘要

The present invention provides a thin film deposition apparatus capable of securing the stability of deposition efficiency. The thin film deposition apparatus according to the present invention includes a body which receives a linear evaporation source which is a solid organic material; a spray nozzle which is combined with the body and discharges the evaporated organic material; and an inner plate which is formed between the body and the nozzle and includes an opening part to discharge the evaporated organic material. The opening part has an aperture ratio of 3 to 5%.