SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND ANTENNA SWITCH MODULE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device excellent in harmonic distortion characteristics while preventing thermal destruction due to self-heating of an FET element of an antenna switch formed on an SOI substrate and controlling large output for high frequencies, to provide a method of manufacturing the semiconductor device, and to provide an antenna switch module.SOLUTION: A semiconductor device has a high-frequency switch device on an SOI (silicon on insulator) substrate, and includes uniform first kind of crystal defects that are formed in the entire supporting substrate of the SOI substrate.