| 摘要 |
A mover (344) moving a stage (238) includes a magnetic component (354), a conductor component (356), and a control system (324). Further, the conductor component (356) interacts with the magnetic component (354) when current is directed to the conductor component (356) to generate a controllable force along a first axis, a controllable force along a second axis, and a controllable force along a third axis. The conductor component (356) can include a split coil design, having a first conductor array (356A) and a second conductor array (356B) that is positioned substantially adjacent to the first conductor array (356A). The control system (324) independently directs current to each of the conductor arrays (356A, 356B). |
