SAMPLE STORAGE CONTAINER, CHARGED PARTICLE BEAM DEVICE, AND IMAGE ACQUISITION METHOD

摘要

PROBLEM TO BE SOLVED: To solve such a problem of a sample storage container used for sample observation in the conventional state of atmosphere, that since it is made for observing a substance in liquid on the assumption that a sample and a diaphragm are basically observed while they are in full contact, a sample not in the visual field of the diaphragm cannot be observed.SOLUTION: A sample storage container includes: a storage container for storing a sample under an atmospheric state different from that on the outside of the sample storage container; a diaphragm through which a charged particle beam passes or transmits; a position adjustment mechanism provided in the sample storage container, and making the relative position of the sample to the diaphragm movable in the horizontal direction or vertical direction, while holding the inside and outside of the sample storage container in different atmospheric state; and an interface connected with the position adjustment mechanism and capable of operating the position adjustment mechanism from the outside of the sample storage container. The sample storage container is installed while housing the sample in a vacuum chamber of a particle beam device.