GAS PROCESSING DEVICE, GAS PROCESSING METHOD, AND BREAKTHROUGH DETECTION METHOD OF GAS PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a gas processing device capable of unfailingly detecting breakthrough.SOLUTION: A gas processing device 1 includes: a container 10; a processing layer 11a; and a sampling port 15. The container 10 has a processing chamber 11. The processing layer 11a is disposed in the processing chamber 11. The processing layer 11a includes a processing agent 14 for processing a processed gas. The sampling port 15 is connected with a gas detector. An end part of the sampling port 15 is positioned in the processing layer 11a.