SPIN COATER HAVING OPTICAL CONTROLLER

摘要

PROBLEM TO BE SOLVED: To provide an improved spin coater system.SOLUTION: A recirculation spin coater system is equipped with a spin coating bowl 12, the spin coating bowl 12 includes a recirculation drainage port 22, and a wet liquid chamber 30 which is additional to the upper end of an inside wall 28 of said spin coating bowl 12. The wet liquid chamber 30 is configured in such a manner that the side wall wet liquid is distributed to the inside wall 28 of the spin coating bowl 12. An image system is configured as to capture an image of a work-piece in the spin coating bowl 12 for the purpose of quality control and positioning of the work-piece. An annular array of a light source surrounds twelve faces of the spin coating bowl and is radiated to the interior of the spin coating bowl 12 for the purpose of optical control. The image system can be utilized for both the purposes of quality control and positioning of the work-piece.