发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 Disclosed are a semiconductor device and a manufacturing method therefor. An exemplary method may comprise: forming on a substrate a first semiconductor layer and a second semiconductor layer in sequence; patterning the second semiconductor layer and the first semiconductor layer, so as to form an initial fin; forming on the substrate an isolation layer, the isolation layer exposing a part of the first semiconductor layer, thereby limiting the fin located above the isolation layer; and forming on the isolation layer a gate stack across the fin, wherein the first semiconductor layer comprises a compound semiconductor, and the concentration of at least one component in the compound semiconductor has a gradual distribution in the stacking direction of the first semiconductor layer and the second semiconductor layer.
申请公布号 WO2014071653(A1) 申请公布日期 2014.05.15
申请号 WO2012CN84818 申请日期 2012.11.19
申请人 INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES 发明人 ZHU, HUILONG
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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