发明名称
摘要 The present invention is an ingot cutting method for cutting a monocrystalline ingot having a cylindrical straight body portion that has been cylindrically ground, and a conical end portion with a mirror finish that has not been cylindrically ground and that is formed on at least one end of the straight body portion, and the ingot cutting method comprises: a step of using a difference in reflection of light between the straight body portion surface that has been cylindrically ground and the conical end portion with a mirror finish that has not been cylindrically ground, and detecting the position of the boundary between the cylindrically ground surface and the surface that has not been cylindrically ground; and a step of performing positioning of a cutting position taking the detected position of the boundary as a base point, then cutting the ingot. Accordingly, provided is an ingot cutting method that can precisely specify the base point of the cutting position and suppress displacement of the cutting position, regardless of diverse monocrystalline ingot diameters and conical end portion shapes.
申请公布号 JP5494444(B2) 申请公布日期 2014.05.14
申请号 JP20100266505 申请日期 2010.11.30
申请人 发明人
分类号 B28D1/10;B24B49/12;B28D1/08;C30B29/06;C30B35/00;H01L21/304 主分类号 B28D1/10
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