发明名称 |
ELECTRODE CONNECTION STRUCTURE OF GRAPHENE FILM |
摘要 |
PROBLEM TO BE SOLVED: To provide an electrode structure that suppresses peeling of an electrode that is connected to a graphene film used for an electronic device and such.SOLUTION: The electrode connection structure of a graphene film has a structure in which a conductive electrode peeling prevention function layer 105 is provided on an electrode 104 that directly contacts a grapheme film 103 and is connected to an extraction electrode 106. |
申请公布号 |
JP2014086592(A) |
申请公布日期 |
2014.05.12 |
申请号 |
JP20120234901 |
申请日期 |
2012.10.24 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
OKIKAWA YUKI;YAMADA TAKATOSHI;HASEGAWA MASATAKA |
分类号 |
H01L21/28;C23C28/00 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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