发明名称 ELECTRODE CONNECTION STRUCTURE OF GRAPHENE FILM
摘要 PROBLEM TO BE SOLVED: To provide an electrode structure that suppresses peeling of an electrode that is connected to a graphene film used for an electronic device and such.SOLUTION: The electrode connection structure of a graphene film has a structure in which a conductive electrode peeling prevention function layer 105 is provided on an electrode 104 that directly contacts a grapheme film 103 and is connected to an extraction electrode 106.
申请公布号 JP2014086592(A) 申请公布日期 2014.05.12
申请号 JP20120234901 申请日期 2012.10.24
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 OKIKAWA YUKI;YAMADA TAKATOSHI;HASEGAWA MASATAKA
分类号 H01L21/28;C23C28/00 主分类号 H01L21/28
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