ELECTROSTATIC CHUCK DIELECTRIC LAYER AND ELECTROSTATIC CHUCK

摘要

PROBLEM TO BE SOLVED: To provide a Johnson-Rahbeck type electrostatic chuck which improves corrosion resistance with respect to plasma gas.SOLUTION: At least a dielectric layer 2 of an electrostatic chuck 10 is formed from a ceramic material containing a first phase of aluminum oxide and fine particles of composite carbonitride (Ti, Me)(C, N) containing titanium as a second phase. Me denotes a transition element and 4 to 6 group metals such as Mo, W are effective particularly. Ceramics in which the second phase occupies 0.05 to 2.5 vol% have a volume resistance value of about 10to 10(&OHgr; cm) required for the Johnson-Rahbeck type electrostatic chuck 10. The composite carbonitride has high effects of suppressing particle growth in an aluminum oxide sintering step. Therefore, during use, a particle drop size can be reduced and further, the quantity of wearing caused by plasma resistance can also be reduced.