CHILLER FOR SEMICONDUCTOR MANUFACTURING DEVICE

摘要

A chiller for a semiconductor manufacturing device comprises: a cooling cycle unit which has a compressor for compressing a first refrigerant to reduce internal temperature of the semiconductor chamber where the semiconductor device is manufactured, and a first circulation pipe which is connected to the compressor and where the first refrigerant is circulated; a heat exchange unit which has a heater controlling the temperature of a second refrigerant by providing heat to the second refrigerant which exchanges heat with the first refrigerant through the first circulation pipe; and a refrigerant provision unit which has a second circulation pipe providing the second refrigerant into the semiconductor chamber and discharging the second refrigerant from the semiconductor chamber. The compressor comprises a variable compressor which controls the compression load of the first refrigerant in response to the temperature difference between the second refrigerant provided to the semiconductor chamber and the second refrigerant discharged from the semiconductor chamber.