发明名称 Bulk removal, transport and storage fixture for small batch-fabricated devices
摘要 The supporting plate and the bulk removal, transport and storage fixture for small batch-fabricated devices (1) have openings (2) penetrating from the top side (3) to the bottom side (4) of the plate and raised retaining means (5) on the bottom side (4). The raised retaining means (5) are provided in sufficient number and are arranged according to the shape of the devices (1) for retaining the devices. Flange means (7) which are designed for providing vacuum or agents to the devices (1) on the supporting plate are connected to the supporting plate thus forming a fixture. By changing the arrangement of the raised retaining means (5) and/or the openings (2) the supporting plate and the fixture may easily be adapted to different sizes and kinds of devices. The supporting plate allows the mechanical fixing of the devices, especially during the removal step. By adding suitable agents the controlled removal of the individual devices which are kept in place during the removal from the carrier, tape or bulk material is achieved. By adding vacuum the removed individual devices are kept at their places for transport or storing purposes. The support plate and the fixture may easily be cleaned and reused several times and thus offer a reliable and cost saving bulk removal, storage and transport system. <IMAGE>
申请公布号 EP0723284(A1) 申请公布日期 1996.07.24
申请号 EP19950100836 申请日期 1995.01.23
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BARTHA, JOHANN, DR.;GRESCHNER, JOHANN, DR.;MEISSNER, KLAUS;WOLF, VOLKHARD, DR.
分类号 H01L21/68;H01L21/687 主分类号 H01L21/68
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