| 摘要 |
PROBLEM TO BE SOLVED: To improve the throughput of a substrate-laminating apparatus. SOLUTION: The substrate-laminating apparatus for pasting substrates, each having an element includes three or more processing portions for executing processing for the substrates, and a transport portion for transporting the substrates with respect to each of the three or more processing portions. Any one of the three or more processing portions is a positioning apparatus for mutually positioning and superimposing the substrates, and the three or more processing portions are each disposed on the circumference with respect to the turning center of the transport portion. COPYRIGHT: (C)2011,JPO&INPIT |
