Resistive hydrogen sensor

摘要

The sensor (1) has a resistance layer (3) connecting an electrical connection (7) and another electrical connection with each other. The resistance layer adjoins at an interface (8a) on electrical contact layers (4b). The contact layers contain a chemical element e.g. zirconium, from a fourth subgroup of a periodic table and/or carbon. The contact layers are connected in series between the connections to the resistance layer. The resistance layer is arranged on a substrate (2) i.e. silicon substrate, and the contact layers are covered by a passivation layer (5b).